The Sievers UPW Boron Analyzerhelps facility managers, DI water engineers, fab process engineers and more address the contamination control requirements of the latest generation fab technologies.
Sievers UPW Boron Analyzer Applications
Semiconductor, microelectronics and thin display manufacturers are using the Sievers UPW Boron Analyzer:
At the outlet of primary mixed-resin beds
Boron is released from these beds prior to silica (find all Boron-related technical papers in the Library), and continuous monitoring of bed effluent provides operators with the earliest indication of changing bed conditions and bed exhaustion.
At the outlet of polishing resins
The earliest indicator of polishing resin exhaustion, and a potential contaminant in wafer processing, real-time boron data from the polishing bed effluent is critical to today's advanced fabrication facilities.
At the outlet of Electrodeionization units
A well-run EDI balances power consumption against contaminant removal. Boron is weakly ionic, and is a critical indicator of EDI performance.
For regeneration processes
An expected source of boron in any UPW system is regenerated resins. Boron specifications for regenerated resins help ensure the lowest possible boron loading of UPW systems, thus minimizing future regenerations and polish resin contaminant loading.